在電子產(chan)品(pin)制(zhi)造中(zhong),靜(jing)電放電往(wang)往(wang)會(hui)損傷器件(jian),甚至使(shi)器件(jian)失效,造成嚴重(zhong)損失,因此二(er)手(shou)貼片(pian)機生產(chan)中(zhong)的(de)靜(jing)電防(fang)護非常重(zhong)要。帶您(nin)了(le)解二(er)手(shou)貼片(pian)機防(fang)靜(jing)電的(de)相(xiang)關知識。
一、靜電和(he)靜電的危害
靜(jing)電(dian)(dian)(dian)是(shi)一種電(dian)(dian)(dian)能,它存留于物體表(biao)面,是(shi)正負電(dian)(dian)(dian)荷(he)在局部(bu)范圍內(nei)失去(qu)平(ping)衡(heng)的結果,通(tong)過電(dian)(dian)(dian)子或離子的轉換而形成的。靜(jing)電(dian)(dian)(dian)現(xian)象(xiang)是(shi)電(dian)(dian)(dian)荷(he)在產(chan)生(sheng)和消(xiao)失過程(cheng)中產(chan)生(sheng)的電(dian)(dian)(dian)現(xian)象(xiang)的總(zong)稱。如摩擦起電(dian)(dian)(dian)、人體起電(dian)(dian)(dian)等(deng)現(xian)象(xiang)。
隨著科技發展,靜(jing)(jing)電(dian)(dian)(dian)(dian)(dian)現象已(yi)在(zai)靜(jing)(jing)電(dian)(dian)(dian)(dian)(dian)噴涂、靜(jing)(jing)電(dian)(dian)(dian)(dian)(dian)紡(fang)織、靜(jing)(jing)電(dian)(dian)(dian)(dian)(dian)分選、靜(jing)(jing)電(dian)(dian)(dian)(dian)(dian)成像等領(ling)域得到廣泛的有效(xiao)應(ying)用(yong)。但在(zai)另一方面,靜(jing)(jing)電(dian)(dian)(dian)(dian)(dian)的產生(sheng)(sheng)在(zai)許(xu)多領(ling)域會(hui)帶(dai)來重(zhong)大危害和(he)損(sun) 失(shi)。在(zai)電(dian)(dian)(dian)(dian)(dian)子工業中(zhong),隨著集成度越(yue)來越(yue)高,集成電(dian)(dian)(dian)(dian)(dian)路的內(nei)絕(jue)緣層(ceng)越(yue)來越(yue)薄,互連導線(xian)寬度與(yu)間距越(yue)來越(yue)小,例如CMOS器(qi)(qi)件(jian)絕(jue)緣層(ceng)的典型厚度約為0.1μm,其 相應(ying)耐擊穿電(dian)(dian)(dian)(dian)(dian)壓在(zai)80-100V;VMOS器(qi)(qi)件(jian)的絕(jue)緣層(ceng)更薄,擊穿電(dian)(dian)(dian)(dian)(dian)壓在(zai)30V。而在(zai)電(dian)(dian)(dian)(dian)(dian)子產品(pin)制(zhi)造中(zhong)以及運輸(shu)、存儲等過程中(zhong)所(suo)產生(sheng)(sheng)的靜(jing)(jing)電(dian)(dian)(dian)(dian)(dian)電(dian)(dian)(dian)(dian)(dian)壓遠(yuan)遠(yuan)超(chao)過 MOS器(qi)(qi)件(jian)的擊穿電(dian)(dian)(dian)(dian)(dian)壓,往往會(hui)使器(qi)(qi)件(jian)產生(sheng)(sheng)硬擊穿或軟擊穿(器(qi)(qi)件(jian)局部損(sun)傷)現象,使其失(shi)效(xiao)或嚴重(zhong)影(ying)響產品(pin)的可靠性(xing)。
二、靜電敏感器件
對靜電(dian)(dian)反應敏(min)感的(de)器件稱為靜電(dian)(dian)敏(min)感元(yuan)器件(SSD)。靜電(dian)(dian)敏(min)感器件主要是(shi)(shi)指超(chao)大規模集成電(dian)(dian)路,特別是(shi)(shi)金(jin)屬化膜半導體(ti)(MOS電(dian)(dian)路)。可根(gen)據SSD分級表,針對不同(tong)(tong)的(de)SSD器件,采取不同(tong)(tong)的(de)靜電(dian)(dian)防護措施。
三(san)、電子產品(pin)制造中的靜電源
1.人(ren)(ren)體(ti)的(de)活動,人(ren)(ren)與(yu)衣服、鞋、襪(wa)等物(wu)體(ti)之間的(de)摩擦(ca)、接觸和分離等產(chan)(chan)生(sheng)的(de)靜電(dian)(dian)(dian)(dian)(dian)是電(dian)(dian)(dian)(dian)(dian)子產(chan)(chan)品(pin)制造中(zhong)主要靜電(dian)(dian)(dian)(dian)(dian)源(yuan)之一。人(ren)(ren)體(ti)靜電(dian)(dian)(dian)(dian)(dian)是導致器件產(chan)(chan)生(sheng)硬擊穿的(de)主要原(yuan)因。人(ren)(ren)體(ti)活動產(chan)(chan)生(sheng)的(de)靜電(dian)(dian)(dian)(dian)(dian)電(dian)(dian)(dian)(dian)(dian)壓約0.5-2KV。另(ling)外空氣濕(shi)度對(dui)靜電(dian)(dian)(dian)(dian)(dian)電(dian)(dian)(dian)(dian)(dian)壓影響(xiang)很大,若在干燥環(huan)境中(zhong)還要上升1個(ge)數量級。相(xiang)對(dui)濕(shi)度對(dui)與(yu)人(ren)(ren)體(ti)活動帶 電(dian)(dian)(dian)(dian)(dian)的(de)關系,人(ren)(ren)體(ti)帶電(dian)(dian)(dian)(dian)(dian)后觸摸到(dao)地線,會產(chan)(chan)生(sheng)放(fang)電(dian)(dian)(dian)(dian)(dian)現象,人(ren)(ren)體(ti)就(jiu)會產(chan)(chan)生(sheng)不(bu)同程度的(de)電(dian)(dian)(dian)(dian)(dian)擊感反(fan)(fan)應(ying),其(qi)反(fan)(fan)應(ying)的(de)程度稱為電(dian)(dian)(dian)(dian)(dian)擊感度。
2.化纖或棉制工(gong)作(zuo)服與(yu)工(gong)作(zuo)臺面、坐椅摩擦時(shi),可在服裝表面產生6000V以上的靜電(dian)電(dian)壓(ya),并使(shi)人體帶電(dian),此時(shi)與(yu)器件(jian)接觸時(shi),會導致放電(dian),容易損壞器件(jian)。
3.橡膠或塑料(liao)鞋底的絕(jue)緣電阻(zu)高達1013Ω,當與地面摩擦時產生靜電,并使人體帶電。